METHOD FOR CONTROLLING A BIAS FOR A CAPACITIVE MICROMECHANICAL ULTRASONIC TRANSDUCER

摘要

The invention relates to a method for calibrating a working point of a capacitive micromechanical transducer, wherein a bias is applied to a membrane of the capacitive micromechanical transducer, at least one capacitance of the capacitive micromechanical transducer is determined, and the bias is controlled as a function of the determined capacitance.