PROFILE MEASURING APPARATUS, METHOD FOR MANUFACTURING STRUCTURE, AND STRUCTURE MANUFACTURING SYSTEM

摘要

A profile measuring apparatus is provided to be capable of carrying out an optimal measurement for various objects, even provided with a gate -shaped frame structure, with an optical measuring probe. The profile measuring apparatus includes a projection unit which projects a pattern on the object from a projection direction; a measurement unit which takes an image of the pattern from a direction different from the projection direction to measure a position on a surface of the object based on an image data obtained with the taken image; an object - rotation unit which rotates the object in two directions; and a pattern - rotation unit which rotates the pattern.