发明名称 |
Four-Terminal Metal-Over-Metal Capacitor Design Kit |
摘要 |
A device includes a first MOM capacitor; a second MOM capacitor directly over and vertically overlapping the first MOM capacitor, wherein each of the first and the second MOM capacitors includes a plurality of parallel capacitor fingers; a first and a second port electrically coupled to the first MOM capacitor; and a third and a fourth port electrically coupled to the second MOM capacitor. The first, the second, the third, and the fourth ports are disposed at a surface of a respective wafer. |
申请公布号 |
US2012104387(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US20100915757 |
申请日期 |
2010.10.29 |
申请人 |
CHEN CHIA-CHUNG;HUANG CHI-FENG;LU TSE-HUA;LIU SALLY;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHEN CHIA-CHUNG;HUANG CHI-FENG;LU TSE-HUA;LIU SALLY |
分类号 |
H01L23/544;H01L29/92 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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