| 发明名称 |
SUBSTRATE TRANSFER APPARATUS |
| 摘要 |
<p>PURPOSE: A substrate transfer apparatus is provided to prevent substrate damage due to vibration by preventing substrate vibration generated during a substrate transfer process. CONSTITUTION: A transfer part(110) is formed by connecting plates into a chain shape. A support part(120) fixes a substrate(S) using elastic force. The support part is comprised of a support stand, a first supporter, and a second supporter which connects the first supporters to each other. The support stand is connected to the plate of the transfer part. The first supporter is arranged on the upper surface of the support stand.</p> |
| 申请公布号 |
KR20120042362(A) |
申请公布日期 |
2012.05.03 |
| 申请号 |
KR20100104032 |
申请日期 |
2010.10.25 |
| 申请人 |
FNS TECH CO., LTD. |
发明人 |
PARK, BYUNG WOO;KIM, PAL KON |
| 分类号 |
H01L21/677;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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