LOADLOCK CHAMBER HAVING BUFFER CHAMBER

摘要

PURPOSE: A load lock chamber which includes a buffer chamber is provided to prevent deformation of a chamber by absorbing stress generated from a pressure difference of each chamber using the buffer chamber. CONSTITUTION: A first substrate mounting table is installed on a first chamber(110). A second chamber(120) is arranged on the upper part of the first chamber. A second substrate mounting table is installed on a second chamber. A buffer chamber(130) is arranged between the first chamber and the second chamber. The internal volume of the buffer chamber is smaller than the first chamber and the second chamber.