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发明名称
FILM-FORMING APPARATUS
摘要
申请公布号
KR20120043095(A)
申请公布日期
2012.05.03
申请号
KR20127006402
申请日期
2010.08.25
申请人
CANON ANELVA CORPORATION
发明人
UENOSONO TAKAHIDE
分类号
C23C14/34;G02F1/13
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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