发明名称 |
LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS |
摘要 |
A leaf spring to be mounted between two objects, the leaf spring configured to have a high stiffness in two orthogonal directions, and a relative low stiffness in other degrees of freedom, wherein the leaf spring has a substantially panel-shaped body, the leaf spring including a first mounting location at or near the center of the panel-shaped body to mount the leaf spring to a first of the two objects, wherein the leaf spring includes one or more second mounting locations at or near the circumference of the panel-shaped body to mount the leaf spring to the second of the two objects, and elongate grooves and/or slits in the panel shaped body between the first mounting location and the second mounting location, the grooves and/or slits running in at least two non-orthogonal directions in the plane of the two orthogonal directions. |
申请公布号 |
US2012105817(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US201113281229 |
申请日期 |
2011.10.25 |
申请人 |
HOOGENDAM CHRISTIAAN ALEXANDER;CUIJPERS MARTINUS AGNES WILLEM;RIEDSTRA BART FRISO;GIJZEN RONALD CORNELIS GERARDUS;BRUIN MAIKEL CORNELIS ANDREAS;ASML NETHERLANDS B.V. |
发明人 |
HOOGENDAM CHRISTIAAN ALEXANDER;CUIJPERS MARTINUS AGNES WILLEM;RIEDSTRA BART FRISO;GIJZEN RONALD CORNELIS GERARDUS;BRUIN MAIKEL CORNELIS ANDREAS |
分类号 |
G03B27/54;F16F1/18;F16F1/26 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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