发明名称 THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME
摘要 <p>Disclosed is a thin film transistor wherein at least a gate electrode, a gate insulating film, an active layer, a source electrode and a drain electrode are provided on a substrate, with the source electrode and the drain electrode being provided on the active layer. The active layer is configured of an amorphous oxide semiconductor. A first water content contained in the gate insulating film is smaller than a second water content contained in the active layer.</p>
申请公布号 WO2012057020(A1) 申请公布日期 2012.05.03
申请号 WO2011JP74289 申请日期 2011.10.21
申请人 FUJIFILM CORPORATION;MOCHIZUKI FUMIHIKO;TAKATA MASAHIRO;ONO MASASHI;TANAKA ATSUSHI;SUZUKI MASAYUKI 发明人 MOCHIZUKI FUMIHIKO;TAKATA MASAHIRO;ONO MASASHI;TANAKA ATSUSHI;SUZUKI MASAYUKI
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
代理机构 代理人
主权项
地址