| 摘要 |
<p>A substrate transfer device is provided with: a robot hand (21) that has a multiple support sections (22) positioned in parallel to each other, and is capable of supporting substrates by being inserted below the substrates; a robot hand raising/lowering mechanism for raising and lowering the robot hand (21); and an ion transmission unit that generates positive ions and/or negative ions, and transmits the generated positive ions and/or negative ions on an air stream. The support sections (22) are provided with discharge holes (25b) for directly blowing the air current containing the positive ions and/or the negative ions transmitted by the ion transmission unit toward the area positioned between adjacent support sections (22), which support the substrates, when the substrates are being supported by the robot hand (21).</p> |
