发明名称 REPAIR METHOD FOR CERAMIC COATING LAYER
摘要 PURPOSE: A repair method for a ceramic coating layer is provided to repair the ceramic coating layer by coating a silicon carbide coating layer on quartz after completely stripping the silicon carbide coating layer coated on the surface of the quartz, thereby reducing costs by enabling continuous use of a quartz material. CONSTITUTION: A part in which a SiC(Silicon Carbide) coating layer(2) is coated is arranged on the surface of a base(1) made of a quartz material. The SiC coating layer is completely stripped by dipping the part into an HF solution. The base exposed by stripping the SiC coating layer is neutralized and dried. SiC is coated on the surface of the neutralized and dried base.
申请公布号 KR20120042095(A) 申请公布日期 2012.05.03
申请号 KR20100103594 申请日期 2010.10.22
申请人 TOKAI CARBON KOREA CO., LTD. 发明人 KIM, JOUNG IL
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址