APPARATUS FOR GENERATING ION CLUSTERS

摘要

The invention relates to an apparatus for generating ion clusters, comprising: a high-voltage-generating unit which generates high voltages for plasma discharge; a case in which the high-voltage-generating unit is embedded; a discharge plate which is arranged over an upper surface of the case and spaced apart therefrom, and which receives high voltages applied thereto and generates ion clusters by means of plasma discharge; and a ground member, one side of which is connected to the ground of an electric circuit unit and the other side of which is elastically connected to the discharge plate in the gap between the upper surface of the case and the discharge plate.