CERAMIC MATERIAL, LAMINATED BODY, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, AND SPUTTERING TARGET MEMBER
摘要
<p>The ceramic material of the present invention has magnesium, aluminium, oxygen, and nitrogen as principal components, and has as the main phase a magnesium-aluminium oxynitride phase having a peak of at least 2?=47-50° in XRD using CuKa.</p>
