发明名称 |
STABLE NANOPARTICLES FOR ELECTROLESS PLATING |
摘要 |
PURPOSE: Stable nano particles for electroless plating are provided to prevent the destruction of a catalyst and the cohesion and settlement of palladium particles during electroless plating. CONSTITUTION: Stable nano particles for electroless plating include glutathione and palladium having a concentration of 25-50ppm. An electroless plating method using the stable nano particles comprises the steps of: providing a plurality of through holes on a substrate, applying a conditioner including one or more kinds of cationic surfactants to the through holes, applying the stable nano particles to the through holes, and plating the walls of the through holes using an electroless metal tub. |
申请公布号 |
KR20120041683(A) |
申请公布日期 |
2012.05.02 |
申请号 |
KR20110108055 |
申请日期 |
2011.10.21 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. |
发明人 |
LIU FENG;RZEZNIK MARIA ANNA |
分类号 |
C23C18/31;B82B3/00 |
主分类号 |
C23C18/31 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|