发明名称 Semiconductor Device and Method for Manufacturing the same
摘要 A semiconductor device and a method for manufacturing the same are provided. The method etches a gate metal material of a sidewall of the active region connected to the storage node contact deeper than a gate metal material of a sidewall of the active region connected to the bit line contact in a buried gate structure to prevent GILD and to reduce resistance of a buried gate, thereby improving refresh characteristics of the semiconductor device.
申请公布号 KR101139987(B1) 申请公布日期 2012.05.02
申请号 KR20100068375 申请日期 2010.07.15
申请人 发明人
分类号 H01L21/336;H01L21/8242;H01L27/108;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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