| 摘要 |
A tiltable MEMS device (20) is disclosed having an asymmetric, electrostatically actuated tiltable platform (22) and a reflector (24) mounted on the platform so that the platform is hidden below the reflector, except for a portion of long side (22B) of the platform (22) extending from under the reflector (24). An electrostatic stator actuator (26) is mounted on the substrate (21) under the long side (22B) of the tiltable platform (22). The range of a unidirectional tilt is increased by providing a recess in the substrate (21) under the extended portion of the platform (22) to accommodate the increased range of movement of the tiltable platform (22). |
