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发明名称
EPITACTIC VAPOR COATING APPARATUS
摘要
申请公布号
US3461836(A)
申请公布日期
1969.08.19
申请号
USD3461836
申请日期
1965.12.28
申请人
SIEMENS AG.
发明人
HEINZ HENKER
分类号
C30B25/14;H01L21/00;(IPC1-7):C23C11/00
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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