发明名称 |
Vibration control apparatus, lithography apparatus, and method of manufacturing article |
摘要 |
A vibration control apparatus (50) includes a first spring mechanism (3) to support a first object as part of a first system. To control vibration of the first object, a first actuator (4) applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism (23) to support a second object as part of a second system. A third spring mechanism (24) supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency. |
申请公布号 |
EP2447776(A2) |
申请公布日期 |
2012.05.02 |
申请号 |
EP20110008268 |
申请日期 |
2011.10.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAWATA, RYO;ASADA, KATSUMI |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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