STRIPPING AGENT AGAINST RESIST RESIDUES,申请号EP19990961289-传众专利搜索

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发明名称	STRIPPING AGENT AGAINST RESIST RESIDUES
摘要
申请公布号	EP1063689(B1)	申请公布日期	2012.05.02
申请号	EP19990961289	申请日期	1999.12.09
申请人	FINE POLYMERS CORPORATION	发明人	YATA, TAKASHI;TERAYAMA, SHIGEK;KOINUMA, YUTAKA;OHGUSHI, TAKERU
分类号	H01L21/302;H01L21/311;C11D7/16;G03F7/42;H01L21/027;H01L21/304;H01L21/3065;H01L21/308	主分类号	H01L21/302
代理机构		代理人
主权项
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