| 摘要 |
An absorbing and holding apparatus is provided to hold a plurality of processed articles individually by increasing the cross section of an exhaust path so that high absorption force can be obtained without varying the other structures of a sawing apparatus. A plurality of cylindrical exhaust pipes(161,162) having different diameters are disposed in the concentric circle with respect to a rotation axis of a table part(120) in a through hole penetrating a rotation driving part(130), separated from each other. An individual path is formed between the outer portions of the cylindrical exhaust pipe of a small diameter adjacent to the inner portion of the cylindrical exhaust pipe of a large diameter, and the inside of the cylindrical exhaust pipe of the large diameter is divided into a plurality of exhaust paths. The plurality of exhaust paths divided by the plurality of cylindrical exhaust pipes are connected to the plurality of exhaust paths of the table part so that a plurality of absorption parts(121,122) are individually connected to each external absorption unit. The plurality of exhaust paths formed by dividing the inside of the cylindrical exhaust pipe of the large diameter have substantially the same cross section.
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