发明名称 Gantry apparatus
摘要 <p>A gantry apparatus includes a structure to couple and support an optical system has enhanced rigidity, which minimizes deformation of the structure even if a plurality of optical systems is coupled to the structure. The gantry apparatus includes an optical system, a drive device to drive the optical system, and a structure to couple and support the drive device. The structure includes a plurality of first plates arranged parallel to one another, and a plurality of second plates intersecting the plurality of first plates to define receptive corridors, each of which receives the drive device.</p>
申请公布号 EP2447778(A2) 申请公布日期 2012.05.02
申请号 EP20110185764 申请日期 2011.10.19
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 HONG, SANG JOON;KIM, OUI SERG;PARK, SANG HYUN;HAMELINCK, ROGER FRANCISCUS MATTHEUS MARIA
分类号 G03F7/20 主分类号 G03F7/20
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