METHOD FOR MANUFACTURING A FILM STRUCTURE

摘要

PURPOSE: A membrane structure manufacturing method is provided to implement processes at low temperatures by using microwave heat treatment and enhance work efficiency by preheating a precursor. CONSTITUTION: A membrane structure manufacturing method comprises forming a precursor on a substrate(S10), preheating the precursor(S20) at a temperature of 100-200°C, and forming a membrane structure by irradiating the precursor with 300MH-300GHz microwaves at a temperature of 350°C or less(S30).