| 摘要 |
A gas injector for thin film and a thin film manufacturing apparatus having the same are provided to cool a driving shaft by implanting a refrigerant into the inside of the driving shaft. A gas injection unit(210) injects a process gas. A driving shaft(220) supplies the process gas to the gas injection unit. A cooling path is formed in the inside of the driving shaft. A first housing(230) is used for supporting the driving shaft. A first seal member(240) is provided between the driving shaft and the first housing. A rotary member(250) is connected to the driving shaft and includes a penetrating path corresponding to the cooling path of the driving shaft. A second housing(260) supports the rotary member and includes a refrigerant inflow/outflow path corresponding to the penetrating path. A second seal member(270) is provided between the rotary member and the second housing.
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