APPARATUS AND METHOD FOR SURFACE TREATMENT IN A FURNACE

摘要

PURPOSE: An apparatus and method for processing the surface within a furnace are provided to minimize reaction of process gas at the door sealing region while permitting that the furnace is safely operated. CONSTITUTION: An exhaust tube(101) is installed by passing through the rear side of a process tube(100). Exhaust gas is transferred according to the exhaust tube and is discharged through a process exhaust valve. An exhaustion trap(105) collects by-products capable of condensation during doping of silicon. A pressure monitoring part(103) monitors the pressure of a process tube. A pressure monitoring part(108) monitors pressure in an exhaust line and a tube of a furnace.