发明名称 Slide parts and equipment including the same
摘要 It is an objective of the invention to provide a slide part in which a seal member formed of an elastic body is in sliding contact with a hard member. There is provided a slide part comprising: a hard member having an amorphous carbon coating containing nitrogen formed on an outermost surface of a substrate; and a seal member formed of an elastic body, the seal member being in sliding contact with the hard member, wherein: content of the nitrogen in the coating is 3 at.% or more and 25 at.% or less, taking a total content of the carbon and the nitrogen in the coating as 100 at.%; the seal member contains fluorine at least in a sliding contact surface region thereof; and content of the fluorine in the surface region of the seal member is equal to or more than the nitrogen content in the coating.
申请公布号 EP2447392(A2) 申请公布日期 2012.05.02
申请号 EP20110187309 申请日期 2011.10.31
申请人 HITACHI, LTD. 发明人 SUGIMOTO, ITTO
分类号 C23C14/06;C23C14/02;C23C14/35;C23C28/00;F04B53/14;F16J15/00;F16J15/324;F16J15/56 主分类号 C23C14/06
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