摘要 |
An image exposing apparatus capable of avoiding degradation in the resolution of an exposed image due to fluctuations in the traveling direction of light that focuses pixel images of the pixel sections of a spatial optical modulation device. The apparatus includes the spatial optical modulation device, such as a DMD having multitudes of pixel sections disposed two-dimensionally; a light source; and image focusing optical systems. It further includes an aperture array disposed at the image location focused by the image focusing optical systems such that each of the pixel images of the pixel sections is positioned at the plane of each of the apertures. The pixel images positioned at the aperture planes of the aperture array are focused into an image by a microlens array, which is then projected onto a photosensitive material by optical systems.
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