发明名称 IMAGE EXPOSING METHOD AND APPARATUS
摘要 An image exposing apparatus capable of avoiding degradation in the resolution of an exposed image due to fluctuations in the traveling direction of light that focuses pixel images of the pixel sections of a spatial optical modulation device. The apparatus includes the spatial optical modulation device, such as a DMD having multitudes of pixel sections disposed two-dimensionally; a light source; and image focusing optical systems. It further includes an aperture array disposed at the image location focused by the image focusing optical systems such that each of the pixel images of the pixel sections is positioned at the plane of each of the apertures. The pixel images positioned at the aperture planes of the aperture array are focused into an image by a microlens array, which is then projected onto a photosensitive material by optical systems.
申请公布号 KR101140621(B1) 申请公布日期 2012.05.02
申请号 KR20077013057 申请日期 2005.12.01
申请人 发明人
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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