| 摘要 |
PURPOSE: A back plate for a target is provided to prevent a bonding material from melting in a portion, where a target and a back plate are joined, adjacent to inlets. CONSTITUTION: A back plate for a target comprises a housing, inlets(12), outlets(13), and cooling channels(14). In the housing, a target is attached and fixed with a bonding material spread on the top surface. The inlets are formed on the lateral side or bottom of the housing in order to supply cooling water. The outlets are formed adjacent to the inlets in order to discharge cooling water. The cooling channels form a transfer path for cooling water by connecting the inlets and the outlets inside the housing. The cooling channels include temperature compensation areas(14a) for controlling the top surface temperature of the housing.
|
