| 发明名称 |
Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method |
| 摘要 |
<p>A binder is mixed to alumina powder with a purity of 99.5% or more (step S11), the mixture is granulated (step S12), resultant granule powder is formed with a die (step S13), and a formed compact is sintered in a hot-pressing manner (step S14).</p> |
| 申请公布号 |
EP1702900(B1) |
申请公布日期 |
2012.05.02 |
| 申请号 |
EP20060251300 |
申请日期 |
2006.03.10 |
| 申请人 |
NGK INSULATORS, LTD. |
发明人 |
MORI, YUTAKA;MATSUDA, HIROTO;NOBORI, KAZUHIRO |
| 分类号 |
C04B35/111;C04B35/645;H01L21/683;H02N13/00 |
主分类号 |
C04B35/111 |
| 代理机构 |
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