发明名称 |
TERAHERTZ-INFRARED ELLIPSOMETER SYSTEM, AND METHOD OF USE |
摘要 |
The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator (BWO); a Smith-Purcell (SP) cell; a free electron laser (FE), or an FTIR source and a solid state device; and a detector such as a Golay cell (GC); a bolometer (BOL) or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system (OBIRS), and optionally including a polarizer (P), at least one compensator (C) and/or modulator (MOD), in addition to an analyzer (A). |
申请公布号 |
EP2446235(A1) |
申请公布日期 |
2012.05.02 |
申请号 |
EP20100792439 |
申请日期 |
2010.06.18 |
申请人 |
J.A. WOOLLAM CO., INC.;UNIVERSITY OF NEBRASKA BOARD OF REGENTS VARNER HALL |
发明人 |
HERZINGER, CRAIG M.;SCHUBERT, MATHIAS M.;HOFMANN, TINO.;LIPHARDT, MARTIN M.;WOOLLAM, JOHN, A. |
分类号 |
G01N21/21;G01N21/35 |
主分类号 |
G01N21/21 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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