发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve operating characteristics of a device by applying bias through body contact and eliminating a hole created in a pillar pattern. CONSTITUTION: A plurality of line patterns(105) is formed on the upper side of a semiconductor substrate(100). A pillar pattern(105a) is formed by etching the upper side of the line pattern. A plurality of gates(140a) is formed between the pillar patterns of a direction crossing with the line pattern. A word line(140b) is formed in the side wall of the pillar pattern. A body contact(160) is formed on upper side of the line pattern between the pillar patterns. A bit line is included in the line pattern. The bit line comprises a bit line bonding area.</p>
申请公布号 KR101140057(B1) 申请公布日期 2012.05.02
申请号 KR20100129291 申请日期 2010.12.16
申请人 SK HYNIX INC. 发明人 SUNG, MIN CHUL
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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