发明名称 Semiconductor device
摘要 The present invention miniaturizes a HEMT element used as a switching element in a radio frequency module. A single gate electrode 17 is formed in an active region defined by an element separation portion 9 on a main surface of a substrate 1 comprising GaAs. The gate electrode 17 is patterned so as to extend in the vertical direction of the page surface between source electrodes 13 and drain electrodes 14, and to extend in left and right directions at other portions. Thus, the ratio of the gate electrode 17 disposed outside the active region is reduced, and the area of a gate pad 17A is reduced.
申请公布号 US8169008(B2) 申请公布日期 2012.05.01
申请号 US20100909300 申请日期 2010.10.21
申请人 YAMANE MASAO;KUROKAWA ATSUSHI;OSAKABE SHINYA;TANGE EIGO;SHIGENO YASUSHI;TAKAZAWA HIROYUKI;MURATA MANUFACTURING CO., LTD. 发明人 YAMANE MASAO;KUROKAWA ATSUSHI;OSAKABE SHINYA;TANGE EIGO;SHIGENO YASUSHI;TAKAZAWA HIROYUKI
分类号 H01L21/338;H01L31/00;H01L21/8252;H01L27/06;H01L29/778;H01L29/812;H01L31/113 主分类号 H01L21/338
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