发明名称 |
Charged particle separation apparatus and charged particle bombardment apparatus |
摘要 |
A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes across which electric voltage is applied in order to generate electric field between the two electrodes thereby deflecting a trajectory of the ionized gas cluster, the electrodes including one of an opening and a void; and a plate opening that allows the ionized gas cluster whose trajectory is deflected by the electric field applying part to go therethrough. |
申请公布号 |
US8168946(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20100816512 |
申请日期 |
2010.06.16 |
申请人 |
NARUSHIMA MASAKI;MORI KOICHI;YAMADA ISAO;TOYODA NORIAKI;TOKYO ELECTRON LIMITED;HYOGO PREFECTURE |
发明人 |
NARUSHIMA MASAKI;MORI KOICHI;YAMADA ISAO;TOYODA NORIAKI |
分类号 |
H01J49/28;H01J3/26 |
主分类号 |
H01J49/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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