发明名称 |
Method for providing a perpendicular magnetic recording (PMR) transducer |
摘要 |
A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench. |
申请公布号 |
US8166632(B1) |
申请公布日期 |
2012.05.01 |
申请号 |
US20080057611 |
申请日期 |
2008.03.28 |
申请人 |
ZHANG JINQIU;HONG LIUBO;SHEN YONG;LI DONGHONG;WESTERN DIGITAL (FREMONT), LLC |
发明人 |
ZHANG JINQIU;HONG LIUBO;SHEN YONG;LI DONGHONG |
分类号 |
G11B5/127;H04R31/00 |
主分类号 |
G11B5/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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