发明名称 |
Measurement and endpointing of sample thickness |
摘要 |
A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing. |
申请公布号 |
US8170832(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20090611023 |
申请日期 |
2009.11.02 |
申请人 |
YOUNG RICHARD J.;PETERSON BRENNAN;SCHAMPERS RUDOLF JOHANNES PETER GERARDUS;MORIARTY MICHAEL;FEI COMPANY |
发明人 |
YOUNG RICHARD J.;PETERSON BRENNAN;SCHAMPERS RUDOLF JOHANNES PETER GERARDUS;MORIARTY MICHAEL |
分类号 |
G01N23/04;G06F17/00 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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