发明名称 On-chip RF shields with through substrate conductors
摘要 Structures of a system on chip and methods of forming a system on chip are disclosed. In one embodiment, the system on a chip includes an RF component disposed on a first part of a substrate, a semiconductor component disposed on a second part of the substrate, the semiconductor component and the RF component sharing a common boundary. The system on chip further includes through substrate conductors disposed in the substrate, the through substrate conductors coupled to a ground potential node, the through substrate conductors disposed around the RF component forming a fence around the RF circuit.
申请公布号 US8169059(B2) 申请公布日期 2012.05.01
申请号 US20080242521 申请日期 2008.09.30
申请人 BARTH HANS-JOACHIM;POHL JENS;BEER GOTTFRIED;NAGY OLIVER;INFINEON TECHNOLOGIES AG 发明人 BARTH HANS-JOACHIM;POHL JENS;BEER GOTTFRIED;NAGY OLIVER
分类号 H01L23/552 主分类号 H01L23/552
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