发明名称 |
Thin-film transistor photosensor, liquid crystal display panel and method of forming dielectric layer having F-SiOC: H compound |
摘要 |
A thin-film transistor photosensor and a liquid crystal display (LCD) panel respectively utilize a dielectric layer having F—SiOC: H compound and a bump structure having F—SiOC: H compound so as to form a thin-film transistor photosensor having lower resistor-capacitor loading (RC loading) and an LCD panel having low-dielectric F—SiOC: H compound respectively. In addition, a method of forming a dielectric layer having F—SiOC: H compound utilizes gases including trimethyl silane, carbon tetrafluoride, argon, and oxygen for thin-film deposition process so as to form a low-k F—SiOC: H compound dielectric layer. |
申请公布号 |
US8169577(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20090581158 |
申请日期 |
2009.10.18 |
申请人 |
LI CHO-YU;CHUNGHWA PICTURE TUBES, LTD. |
发明人 |
LI CHO-YU |
分类号 |
G02F1/1337;H01L21/469;H01L27/14;H01L31/00 |
主分类号 |
G02F1/1337 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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