发明名称 Integrated microphone
摘要 A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.
申请公布号 US8169042(B2) 申请公布日期 2012.05.01
申请号 US20100845348 申请日期 2010.07.28
申请人 WEIGOLD JASON W.;MARTIN JOHN R.;BROSNIHAN TIMOTHY J.;ANALOG DEVICES, INC. 发明人 WEIGOLD JASON W.;MARTIN JOHN R.;BROSNIHAN TIMOTHY J.
分类号 G01L9/00;G10K13/00;H01L21/00 主分类号 G01L9/00
代理机构 代理人
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