发明名称 Method for simultaneous recrystallization and doping of semiconductor layers and semiconductor layer systems produced according to this method
摘要 A method for simultaneous recrystallization and doping of semiconductor layers, in particular for the production of crystalline silicon thin layer solar cells. A substrate base layer 1 is produced, and subsequently, an intermediate layer system 2 which has at least one doped partial layer is deposited on the base layer. An absorber layer 3 which is undoped or likewise doped is deposited on the intermediate layer system 2, and in a recrystallisation step, the absorber layer 3 is heated, melted, cooled and tempered. Alternately, instead of an undoped capping layer, a capping layer system 4 which has at least one partial layer can also be applied on the absorber layer 3.
申请公布号 US8168972(B2) 申请公布日期 2012.05.01
申请号 US20100897900 申请日期 2010.10.05
申请人 REBER STEFAN;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 REBER STEFAN
分类号 H01L29/04 主分类号 H01L29/04
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