| 摘要 |
A method for fabricating a dual poly gate in a semiconductor device, comprising: forming a gate insulation layer and a polysilicon layer on a semiconductor substrate that defines a first region and a second region; implanting first and second conductive type impurity ions into the first region and the second region of the polysilicon layer, respectively; forming first and second conductive type polysilicon layer in the first and second regions, respectively, by annealing the semiconductor substrate; forming a barrier metal layer on the first and second conductive type polysilicon layers; forming an oxide layer that lowers resistance of a metal by an oxidation process; forming a metal layer and a hard mask layer on the oxide layer; and forming a first conductive type poly gate on the first region and a second conductive type poly gate on the second region by a patterning process. |
