发明名称 Method for manufacturing semiconductor device
摘要 A method for manufacturing a semiconductor device, the semiconductor device including an integrated circuit having plural connection terminals arranged on a predetermined local region of the integrated circuit, plural metal bumps, and a wiring layer connected to at least a portion of the connection terminals via the plural metal bumps, the method includes the steps of a) measuring an impedance value of the predetermined local region of the integrated circuit, b) determining whether the measured impedance value matches a predetermined impedance value, c) determining positions of the plural metal bumps in accordance with the determination result of step b), d) forming the plural metal bumps on the positions determined in step c), and e) forming the wiring layer on the plural metal bumps.
申请公布号 US8168452(B2) 申请公布日期 2012.05.01
申请号 US20100954714 申请日期 2010.11.26
申请人 MAKI KEIGO;ITO DAISUKE;SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 MAKI KEIGO;ITO DAISUKE
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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