NITROGEN-CONTAINING ORGANIC COMPOUND, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS

摘要

PURPOSE: A nitrogen-containing organic compound is provided to ensure high resolution and pattern sphericity. CONSTITUTION: A nitrogen-containing organic compound is denoted by chemical formula 1. A positive chemical amplification resist material contains nitrogen-containing organic compounds of chemical formula 1 as a quencher. The material contains nitrogen-containing organic compound, organic solvent, base resin which changes solubility of an alkali developing solution by acid; a photoacid generator, and sulfonium salt compound of chemical formula 2.