发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to reduce a leakage current between a drain and a source by using a compound conductor having a work function with more than 5.5 electron volts. CONSTITUTION: An oxide semiconductor film(106) includes indium. A gate electrode includes a compound conductor. An insulating layer(102) is formed between the oxide semiconductor film and the gate electrode. The compound conductor includes the indium and nitrogen. A band gap in the compound conductor is less than 2.8 electron volts.</p>
申请公布号 KR20120041131(A) 申请公布日期 2012.04.30
申请号 KR20110106790 申请日期 2011.10.19
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 IMOTO YUKI;MARUYAMA TETSUNORI;OMATA TAKATSUGU;NONAKA YUSUKE;HONDA TATSUYA;MIYANAGA AKIHARU
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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