发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
<p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to reduce a leakage current between a drain and a source by using a compound conductor having a work function with more than 5.5 electron volts. CONSTITUTION: An oxide semiconductor film(106) includes indium. A gate electrode includes a compound conductor. An insulating layer(102) is formed between the oxide semiconductor film and the gate electrode. The compound conductor includes the indium and nitrogen. A band gap in the compound conductor is less than 2.8 electron volts.</p> |
申请公布号 |
KR20120041131(A) |
申请公布日期 |
2012.04.30 |
申请号 |
KR20110106790 |
申请日期 |
2011.10.19 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
IMOTO YUKI;MARUYAMA TETSUNORI;OMATA TAKATSUGU;NONAKA YUSUKE;HONDA TATSUYA;MIYANAGA AKIHARU |
分类号 |
H01L29/786;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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