| 摘要 |
PURPOSE: An apparatus and a method for supplying a raw material are provided to prevent a semiconductor treating process from being stopped by continually supplying chemicals. CONSTITUTION: A raw material storing part(10) stores and supplies a raw material. Material discharging pipes(L41,L51) discharges the raw material saved in the raw material storing part. An on-off valve opens and closes the material discharging pipes while being installed on material discharging pipes. Control valves(A2,A3) is connected to the on-off valve. The control valve controls the on-off valve to keep emergency situation occurrence to be the same as a situation occurrence state.
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