VESSEL INCORPORATING FILM WITH ENHANCED ANTI-STATIC PROPERTIES AND RELATED METHODS
摘要
Title: VESSEL INCORPORATING FILM WITH ENHANCED ANTI-STATIC PROPERTIES AND RELATED METH- ODS[err]Abstract: An apparatus for use in material processing takes the form of a vessel including a wall at least partially formed of a flexible fiho The film includes at least two layers having an anti-static agent and sandwiching an intermediate layer. Related methods are also disclosed.
申请公布号
SG179185(A1)
申请公布日期
2012.04.27
申请号
SG20120018743
申请日期
2010.09.16
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.;ATMI NV
发明人
PETHE, VISHWAS;BHELLA, RICHARD;VANHAMEL, STEVEN;MEESTERS, ELS