发明名称 METHOD AND APPARATUS FOR SHOWERHEAD CLEANING
摘要 <p>Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.</p>
申请公布号 SG179155(A1) 申请公布日期 2012.04.27
申请号 SG20120018347 申请日期 2010.09.14
申请人 QUANTUM GLOBAL TECHNOLOGIES LLC 发明人 SOMMERS, JOSEPH, F.;WANG, JIANSHENG;DO, DAVID;ADAMALA, SATYANARAYANA;TRAHAN, RONALD
分类号 主分类号
代理机构 代理人
主权项
地址