| 摘要 |
<P>PROBLEM TO BE SOLVED: To further improve resolution of a spherical aberration correction electron microscope by building electron beam having a small energy width. <P>SOLUTION: An electron beam prism 3, a dispersion angle amplification lens 6 and aperture 8 are provided between an electron gun 2 and an observation sample 11, the energy dispersion of electron beam orbit occurs by the prism, dispersion angle is amplified by the dispersion angle amplification lens, and only an electron beam passing through the aperture provided next to the dispersion angle amplification lens is used, thereby preparing a microscopic image of the observation sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
