| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a precision filter unit with superior pressure resistance and an improved filtering flow rate, using a porous alumina membrane filter. <P>SOLUTION: There is provided a method for manufacturing a precision filter unit, which is composed of an anodic oxidation film of aluminum, has a regularization degree of 50% or more, has micropores with a standard deviation of pore diameters being within 10% of an average pore diameter, and has at least: the porous alumina membrane filter formed by performing an anodic oxidation treatment of forming the oxidation film having the micropores on an aluminum substrate surface, a separation treatment of separating the oxidation film from the aluminum substrate, and a penetration treatment of penetrating the micropores of the oxidation film in this order by performing processes of at least (a) forming the anodic oxidation film having the micropores on the surface of the aluminum substrate, (b) partially dissolving the anodic oxidation film, (c) growing the micropores in the depth direction, and (d) removing the anodic oxidation film above an inflection point of a sectional form of the micropores in this order; and a porous material being in contact with at least one side surface of the porous alumina membrane filter, having an average pore diameter of 500 nm-10 mm, having an opening area per unit area larger than that of the porous alumina membrane filter, and having a Young's modulus larger than 660 MPa. <P>COPYRIGHT: (C)2012,JPO&INPIT |
