发明名称 DRYING METHOD FOR SURFACE STRUCTURE BODY
摘要 To provide a drying method for a surface structure body in which a first liquid deposited onto the surface structure body is rapidly solidified and that makes possible concurrent drying of multiple surface structure bodies. The present invention provides a drying method for a surface structure body having a first liquid deposited thereon, including the steps of: placing a surface structure part of the surface structure body in a second liquid that is a liquid at a temperature, said temperature being lower than a solidification point of the first liquid; solidifying the first liquid in the second liquid; removing the second liquid from the surface structure part while the first liquid is in a solidified state; and sublimating the solidified first liquid.
申请公布号 WO2012006139(A3) 申请公布日期 2012.04.26
申请号 WO2011US42300 申请日期 2011.06.29
申请人 3M INNOVATIVE PROPERTIES COMPANY;NORIMOTO, MASASHI 发明人 NORIMOTO, MASASHI
分类号 H01L21/302;B82Y40/00 主分类号 H01L21/302
代理机构 代理人
主权项
地址