| 摘要 |
A semiconductor device and a method for forming the same are disclosed. In the method for manufacturing the semiconductor device, a lower electrode material is deposited over a semiconductor substrate including a lower electrode contact plug so as to form a sacrificial insulation film. After the sacrificial insulation film and a lower electrode material are etched using a dry etching process, additional lower electrode material is deposited and etched back so as to form a lower electrode. As a result, a margin or region between a lower electrode contact plug and the lower electrode can be guaranteed. |
