APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES

摘要

PROBLEM TO BE SOLVED: To provide in-line equipment used to process substrates.

SOLUTION: In some applications, the equipment is used in in-line manufacture of PV cells or modules. In some embodiments, a heating system is provided that comprises a plurality of heating technologies for heat treatment of substrates, where a first heating system is used to rapidly raise temperature of the substrate to a desired set point and a second heating system is used to maintain the substrate at the temperature set point throughout a thermal treatment process.

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