| 摘要 |
Devices, systems, and methods for semiconductor die temperature management are described and discussed herein. An IC device is described that includes at least one intra-die cooling structure. In an embodiment, the IC device includes at least one coolant reservoir and at least one coolant channel disposed wholly within integral layers of the semiconductor die. The at least one coolant reservoir includes at least one through-reservoir via. The at least one through-reservoir via may be constructed to provide structural support to the at least one coolant reservoir. The at least one through-reservoir via may also be constructed to provide a path for the transfer of thermal energy, electrical signals, and/or power signals. The at least one through-reservoir via may be constructed to provide any combination of structural support and thermal energy transfer, electrical signal transfer, or power transfer.
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